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Natural Frequency Characteristics or the Nanopositioning x-y Stage
更新时间：2020-08-12

    • Natural Frequency Characteristics or the Nanopositioning x-y Stage

    • Optics and Precision Engineering   Vol. 3, Issue 6, Pages: 50-54(1995)

    • Received：30 September 1995，

      Published Online：15 December 1995，

      Published：15 December 1995

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  • Wu Yihui, Yang Hongbo. Natural Frequency Characteristics or the Nanopositioning x-y Stage[J]. Editorial Office of Optics and Precision Engineering, 1995,(6): 50-54 DOI：

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