Fem and Experiment or Piezoelectric Micromotors

Cui Tianhong; Wu Qingwen; Wang Liding; Lu Qiongying

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Fem and Experiment or Piezoelectric Micromotors

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- Fem and Experiment or Piezoelectric Micromotors
- Optics and Precision Engineering Vol. 3, Issue 6, Pages: 40-43(1995)
- 作者机构：
  
  1. 中国科学院长春光学精密机械研究所长春,130022
  2. 清华大学精仪系北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：25 September 1995，
  
  Published Online：15 December 1995，
  
  Published：15 December 1995
- 稿件说明：
移动端阅览
崔天宏, 吴清文, 王立鼎, 吕琼莹. 压电微马达有限元分析及实验研究[J]. 光学精密工程, 1995,(6): 40-43

Cui Tianhong, Wu Qingwen, Wang Liding, Lu Qiongying. Fem and Experiment or Piezoelectric Micromotors[J]. Editorial Office of Optics and Precision Engineering, 1995,(6): 40-43
崔天宏, 吴清文, 王立鼎, 吕琼莹. 压电微马达有限元分析及实验研究[J]. 光学精密工程, 1995,(6): 40-43 DOI：

Cui Tianhong, Wu Qingwen, Wang Liding, Lu Qiongying. Fem and Experiment or Piezoelectric Micromotors[J]. Editorial Office of Optics and Precision Engineering, 1995,(6): 40-43 DOI：

摘要

压电微马达是微型机械领域中的一个崭新课题

本文从动力学角度对压电微马达进行有限元分析

得出固有频率和定子表面切应力场等重要结论

并通过模型样机实验研究验证有限元分析结论的正确性

从而为压电微马达的优化设计奠定了基础。

Abstract

The piezoelectric micromotor is a new project in the field of Micro Electro Mechanical Systems

In this paper

FFM of the piezoelectric micromotor has been conducted in dynamicsin order to get some important results such as resonance frequencies

shearing force on thestator surface

etc.. The experiment of the piezoelectric micromotor has also been carriedout so that the FEM results of the piezoelectric micromotor has been proved.This has laid asolid foundation for the piezoelectric micromotor optimum design.

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Related Author

L? Qiongying

Wang Liding

Cul Tianhong

L? Qiongying

Cui Tianhong

Wang Liding

Jing-xu ZHANG

Fei YANG

Related Institution

Dept. of Precision instrument, Tsinghua University

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022

Tsinghua University

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

北京航空航天大学仪器科学与光电工程学院

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