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1. 中国科学院长春光学精密机械研究所 长春,130022
2. 南京光学仪器厂 南京,210008
Received:24 May 1995,
Published Online:15 February 1996,
Published:15 February 1996
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付永启, 刘怀道. 动态目标发生器圆鼓图形光刻掩模板的研制[J]. 光学精密工程, 1996,(1): 29-32
Fu Yongqi, Liu Huaidao. Design or Mask for Dynamic Aim Generator Image[J]. Editorial Office of Optics and Precision Engineering, 1996,(1): 29-32
付永启, 刘怀道. 动态目标发生器圆鼓图形光刻掩模板的研制[J]. 光学精密工程, 1996,(1): 29-32 DOI:
Fu Yongqi, Liu Huaidao. Design or Mask for Dynamic Aim Generator Image[J]. Editorial Office of Optics and Precision Engineering, 1996,(1): 29-32 DOI:
本文详细论述了动态目标发生器圆鼓图形光学刻划掩模板的设计思想及其制作过程
经试刻效果良好.为非球面光刻掩模板的制作开创了一条新途径.
This paper describes design idea of mask manufacture of dynamic aim generator imageand its mading process.It was used in experimental lithography and got a better result.Anew method was found for the manufacture of nonglobal mask.
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