Discussion on Homogeneity Error-calibrating of Metrelogy Gratings
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Discussion on Homogeneity Error-calibrating of Metrelogy Gratings
Optics and Precision EngineeringVol. 4, Issue 2, Pages: 109-113(1996)
作者机构:
中国科学院长春光学精密机械研究所 长春,130022
作者简介:
基金信息:
DOI:
CLC:
Received:25 October 1995,
Published Online:15 April 1996,
Published:15 April 1996
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杨进堂. 检测计量光栅均匀性误差的探讨[J]. 光学精密工程, 1996,(2): 109-113
Yang Jintang. Discussion on Homogeneity Error-calibrating of Metrelogy Gratings[J]. Editorial Office of Optics and Precision Engineering, 1996,(2): 109-113
Yang Jintang. Discussion on Homogeneity Error-calibrating of Metrelogy Gratings[J]. Editorial Office of Optics and Precision Engineering, 1996,(2): 109-113DOI:
Discussion on Homogeneity Error-calibrating of Metrelogy Gratings