张二星. 微型机械运动参数测试仪光学机械系统研究[J]. 光学精密工程, 1996,(2): 48-52

Zhang Erxing. Research into an Optical and Mechanical System of the Instrument for Measuring Dynamics of Micromechanism[J]. Editorial Office of Optics and Precision Engineering, 1996,(2): 48-52

张二星. 微型机械运动参数测试仪光学机械系统研究[J]. 光学精密工程, 1996,(2): 48-52 DOI：

Zhang Erxing. Research into an Optical and Mechanical System of the Instrument for Measuring Dynamics of Micromechanism[J]. Editorial Office of Optics and Precision Engineering, 1996,(2): 48-52 DOI：