Development of Radial Metal Grating by Photoetching Technique

Jin Zhenyu

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Development of Radial Metal Grating by Photoetching Technique

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- Development of Radial Metal Grating by Photoetching Technique
- Optics and Precision Engineering Vol. 4, Issue 3, Pages: 85-90(1996)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：12 January 1996，
  
  Published Online：15 June 1996，
  
  Published：15 June 1996
- 稿件说明：
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金轸裕. 运用光蚀刻技术制造金属光栅盘[J]. 光学精密工程, 1996,(3): 85-90

Jin Zhenyu. Development of Radial Metal Grating by Photoetching Technique[J]. Editorial Office of Optics and Precision Engineering, 1996,(3): 85-90
金轸裕. 运用光蚀刻技术制造金属光栅盘[J]. 光学精密工程, 1996,(3): 85-90 DOI：

Jin Zhenyu. Development of Radial Metal Grating by Photoetching Technique[J]. Editorial Office of Optics and Precision Engineering, 1996,(3): 85-90 DOI：

摘要

光蚀刻技术广泛应用于金属部件的成型和加工

本文介绍用光蚀刻技术制造金属光栅盘的方法及其中的几个主要问题。

Abstract

The photoetching technique is widely used in the forming and manufacturing of metal components.In this paper a manufacturing method of radial metal gratings by photoetching technique is introduced

and some technique problems are discussed.

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Related Author

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Related Institution

State Lab of Optical Technologies for Microfabrication, Institute of Optics & Electronics, Chinese Academy of Sciences

Central Microstructure Facility, Rutherford Appleton Laboratory Chilton, Didcot, Oxon QX

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