Application of Laser Photoforming Technology in Machining of micromachines

Shen Lianguan; Wang Xiang; Den Yimi

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Application of Laser Photoforming Technology in Machining of micromachines

更新时间：2020-08-12

- Application of Laser Photoforming Technology in Machining of micromachines
- Optics and Precision Engineering Vol. 3, Issue 2, Pages: 11-15(1995)
- 作者机构：
  
  中国科学技术大学精密机械与精密仪器系,安徽合肥,230026
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：12 January 1995，
  
  Published Online：15 April 1995，
  
  Published：15 April 1995
- 稿件说明：
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沈连官, 王翔, 邓益民. 激光光刻成型法在微型机械研究中的应用[J]. 光学精密工程, 1995,(2): 11-15

Shen Lianguan, Wang Xiang, Den Yimi. Application of Laser Photoforming Technology in Machining of micromachines[J]. Editorial Office of Optics and Precision Engineering, 1995,(2): 11-15
沈连官, 王翔, 邓益民. 激光光刻成型法在微型机械研究中的应用[J]. 光学精密工程, 1995,(2): 11-15 DOI：

Shen Lianguan, Wang Xiang, Den Yimi. Application of Laser Photoforming Technology in Machining of micromachines[J]. Editorial Office of Optics and Precision Engineering, 1995,(2): 11-15 DOI：

摘要

本文扼要介绍了现阶段国内外用于研制微型机械的主要方法

着重介绍了激光光刻成型法的基本原理、制作微型机械的工艺途径、技术特色及其应用前景。

Abstract

The machining methods and technology of micro-machines currently applied in the worldare briely introduced foundamental princile of Iaser photoforming technology and itsapplication in machining of micromachines are presented.The paper also looks into its futureresearch and application trends.

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Related Institution

Institute of Mechatronic Engineering, Foshan Science and Technology College

Dept. of Machatronic Engineering, South China University of Technology

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022

Changchun Institute of Optics Fine Mechanics, Chinese Academy of Sciences, Changchun, 130022

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

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