Detection Methods of Super-micro Force in SFM

Yu Jianhong; Huang Wenhao

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Detection Methods of Super-micro Force in SFM

更新时间：2020-08-12

- Detection Methods of Super-micro Force in SFM
- Optics and Precision Engineering Vol. 3, Issue 3, Pages: 1-7(1995)
- 作者机构：
  
  中国科学技术大学精密机械与精密仪器系合肥,230026
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：07 March 1995，
  
  Published Online：15 June 1995，
  
  Published：15 June 1995
- 稿件说明：
移动端阅览
于建宏, 黄文浩. 扫描力显微镜中超微力的探测方法[J]. 光学精密工程, 1995,(3): 1-7

Yu Jianhong, Huang Wenhao. Detection Methods of Super-micro Force in SFM[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 1-7
于建宏, 黄文浩. 扫描力显微镜中超微力的探测方法[J]. 光学精密工程, 1995,(3): 1-7 DOI：

Yu Jianhong, Huang Wenhao. Detection Methods of Super-micro Force in SFM[J]. Editorial Office of Optics and Precision Engineering, 1995,(3): 1-7 DOI：

摘要

本文介绍了近十年来

各国科学家在研究扫描力显微镜的过程中所采用的各种超微力(10

-8

～10

-10

N)传感器的探测方法。评述了各种方法的灵敏度

抗振性

使用范围

操作方式和各自的优缺点。并对最近出现的几种新的探测方法作了说明。

Abstract

In this paper

some detection methods of Super-micro force sensor used in researchingscanning force microscopy are introduced

and their sensitivity

anti-viberation

operationscope

operation method

advantages and disadvantages are evaluated

and several new detection methods are illustrated.

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