Review of Some Integrated Silicon Micro-sensor Systems

您当前的位置：

首页 >

文章列表页 >

更新时间：2020-08-12

- Review of Some Integrated Silicon Micro-sensor Systems
- Optics and Precision Engineering Vol. 4, Issue 1, Pages: 25-28(1996)
- 作者机构：
  
  重庆大学国家教委光电技术及系统开放实验室重庆,630044
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：17 July 1995，
  
  Published Online：15 February 1996，
  
  Published：15 February 1996
- 稿件说明：
移动端阅览
温志渝, 费龙, 胡松, 钟先信. 几种新型集成硅微(型)传感器系统[J]. 光学精密工程, 1996,(1): 25-28

Wen Zhiyu, Fei Long, Hu Song, Zhong Xianxin. Review of Some Integrated Silicon Micro-sensor Systems[J]. Editorial Office of Optics and Precision Engineering, 1996,(1): 25-28
温志渝, 费龙, 胡松, 钟先信. 几种新型集成硅微(型)传感器系统[J]. 光学精密工程, 1996,(1): 25-28 DOI：

Wen Zhiyu, Fei Long, Hu Song, Zhong Xianxin. Review of Some Integrated Silicon Micro-sensor Systems[J]. Editorial Office of Optics and Precision Engineering, 1996,(1): 25-28 DOI：

介绍了作者近年来在硅微机械加工技术和半导体集成电路技术相结合的基础上研制的硅微机械与光纤组合式阵列声传感器、集成硅微机械光压力传感器和微型多道成像光谱分析系统的结构、工作原理及制造工艺.

This paper reviews some integrated silicon micro-sensor systems

hybrid silicon micromachine and optical fibre array sensor

integrated silicon micro-mechancial optical pressuresensor and micro-multichannel spectrum analyzer

which have been developed by authors inrecent years.The structures

working principles and frbrication processes are briefly introduced.

Views

490

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰