L&#252; Junxia, Cao Jianlin. Preliminary Researches of Mo/B<sub>4</sub>C Multelayers at 8.0 nm Wavelength[J]. Editorial Office of Optics and Precision Engineering, 1996,4(5): 36-40
L&#252; Junxia, Cao Jianlin. Preliminary Researches of Mo/B<sub>4</sub>C Multelayers at 8.0 nm Wavelength[J]. Editorial Office of Optics and Precision Engineering, 1996,4(5): 36-40DOI:
Preliminary Researches of Mo/B4C Multelayers at 8.0 nm Wavelength
This thesis represents the preliminary results of normal-incidence Mo/B
4
C soft X-ray multi-layer for 8.0 nm
The fabrication procedure including material selection
the design and perfor-mfince simulation of soft X-ray multilayers
and coating technique by magnetron sputtering is discussed. The microstructure of samples are characterized by low-angle X-ray diffraction. These multilayer mirrors will be used in the double-path ezperiments of X-ray laser researches.
Preparation and characterization of ScAlN thin film with high scandium concentration
Investigation on microstructures and interfaces of NiC/Ti neutron multilayers
Surface modification of 2 m RB-SiC substrate by magnetron sputtering
Optical and electrical properties of vanadium pentoxide films prepared by RF reactive magnetron sputtering
Preparation of Co/Ti multilayer in soft X-ray region by nitrogen reactive sputtering
Related Author
Shu-qiang YANG
Jun-qiang WANG
Chao ZHANG
Yu-xin CHEN
Zheng-guo SHANG
Zhong ZHANG
Xin JIN
Wen-bin LI
Related Institution
College of Optoelectronic Engineering, Chongqing University
Beijing Institute of Spacecraft Environmental Engineering
College of Physics & Electronic Information, Luoyang Normal University
MOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University
Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences