Studies on High current Hollow Cathode Source in Soft X Ray and VUV

Wang Shurong; Tang Yuguo

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Studies on High current Hollow Cathode Source in Soft X Ray and VUV

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- Studies on High current Hollow Cathode Source in Soft X Ray and VUV
- Optics and Precision Engineering Vol. 5, Issue 1, Pages: 5-9(1997)
- 作者机构：
  
  中国科学院长春光学精密机械研究所应用光学国家重点实验室, 长春, 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：05 September 1996，
  
  Published Online：15 February 1997，
  
  Published：15 February 1997
- 稿件说明：
移动端阅览
王淑荣, 唐玉国. 软X射线-真空紫外大电流空阴极光源的研究[J]. 光学精密工程, 1997,(1): 5-9

Wang Shurong, Tang Yuguo. Studies on High current Hollow Cathode Source in Soft X Ray and VUV[J]. Editorial Office of Optics and Precision Engineering, 1997,(1): 5-9
王淑荣, 唐玉国. 软X射线-真空紫外大电流空阴极光源的研究[J]. 光学精密工程, 1997,(1): 5-9 DOI：

Wang Shurong, Tang Yuguo. Studies on High current Hollow Cathode Source in Soft X Ray and VUV[J]. Editorial Office of Optics and Precision Engineering, 1997,(1): 5-9 DOI：

摘要

描述了最近研制成功的用于软X射线-真空紫外光谱辐射传递标准光源的大电流空阴极光源。它由两个阳极、一个阴极和一个两级差分泵单元组成

工作电流2A

工作气体为氩和氦

气压10Pa～100Pa.能在13nm～200nm间产生ArⅠ、ArⅡ、HeⅠ、HeⅡ、AlⅡ、AlⅢ和AlⅣ谱线。光源辐射稳定性优于±1%

重复性优于±5%.

Abstract

This paper describes the newly developed high current hollow cathode source as a soft X ray and vacuum ultraviolet spectral radiation transfer standard source.It consists of two anodes

a cathode and a two stage differetial pumping unit operated at a constant current of 2A with helium or argon as buffer gas at pressures 10 Pa-100 Pa.Several spectral lines of ArⅠ

ArⅡ

HeⅠ

HeⅡ

AlⅡ

AlⅢ and AlⅣ appear at spectral range 13 nm-200 nm.The spectral radiance stability is better than ±1% and the reproducibility is better than ±5%.

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