Study on Some Characteristics of Planar Holographic Sinusoidal Gratings and Blazed Gratings Used in UV Region in Theory

Wang Shuhong; Li Futian

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Study on Some Characteristics of Planar Holographic Sinusoidal Gratings and Blazed Gratings Used in UV Region in Theory

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- Study on Some Characteristics of Planar Holographic Sinusoidal Gratings and Blazed Gratings Used in UV Region in Theory
- Optics and Precision Engineering Vol. 5, Issue 2, Pages: 12-18(1997)
- 作者机构：
  
  中国科学院长春光学精密机械研究所, 国家重点实验室, 长春, 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：24 February 1997，
  
  Published Online：15 June 1997，
  
  Published：15 June 1997
- 稿件说明：
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米宝永. 等离子与反应离子刻蚀终点的在线监测——光学反射法[J]. 光学精密工程, 1997,(3): 90-95

Mi Baoyong. In Situ Monitoring of Etching End-Point for Plasma and Reactive ion Etching by the Optical Reflection[J]. Editorial Office of Optics and Precision Engineering, 1997,(3): 90-95
米宝永. 等离子与反应离子刻蚀终点的在线监测——光学反射法[J]. 光学精密工程, 1997,(3): 90-95 DOI：

Mi Baoyong. In Situ Monitoring of Etching End-Point for Plasma and Reactive ion Etching by the Optical Reflection[J]. Editorial Office of Optics and Precision Engineering, 1997,(3): 90-95 DOI：

摘要

基于有限电导率光栅的微分理论

对工作在紫外光区的全息正弦光栅和三角槽形光栅的衍射效率做了数值计算。给出了紫外全息光栅的闪耀特性分布曲线并分析了三角槽形光栅顶角大小对衍射效率的影响。

Abstract

Diffraction efficiency of Al-coated triangle and holographic sinusoidal grating used in UV region are calculated using the differential formalism of exact electromagnetic theory.The efficiency curves of blazed characteristic of sinusoidal grating is presented.And the influence of apex angle on diffraction efficiency of triangle grating is debated.

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