Application of Area-array CCD in Semiconductor Material Stresses Measuring

Zhou Duan; Yang Yintang

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Application of Area-array CCD in Semiconductor Material Stresses Measuring

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- Application of Area-array CCD in Semiconductor Material Stresses Measuring
- Optics and Precision Engineering Vol. 5, Issue 4, Pages: 119-122(1997)
- 作者机构：
  
  西安电子科技大学微电子所西安,710071
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：27 March 1997，
  
  Published Online：15 August 1997，
  
  Published：15 August 1997
- 稿件说明：
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周端, 杨银堂. 采用 CCD 器件的半导体材料应力测试仪的研制[J]. 光学精密工程, 1997,(4): 119-122

Zhou Duan, Yang Yintang. Application of Area-array CCD in Semiconductor Material Stresses Measuring[J]. Editorial Office of Optics and Precision Engineering, 1997,(4): 119-122
周端, 杨银堂. 采用 CCD 器件的半导体材料应力测试仪的研制[J]. 光学精密工程, 1997,(4): 119-122 DOI：

Zhou Duan, Yang Yintang. Application of Area-array CCD in Semiconductor Material Stresses Measuring[J]. Editorial Office of Optics and Precision Engineering, 1997,(4): 119-122 DOI：

摘要

研究和实现了采用面阵CCD器件的半导体材料应力测试仪。介绍了测量原理

设计完成了相应的光学测量系统、硬件控制系统和控制测量所需的软件。最后介绍了对硅上SiO

、Si

膜应力实际测量的结果。

Abstract

An instrument based on area-array CCD devices for measuring stresses in semiconductor materials is studied and realized.The basic principle of measurement is presented.The optical system

hardware controlling system and measuring software are designed.The experimental results of stresses in SiO

and Si

film on Si substrate are given.

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Related Institution

Beijing Innovation Center for Future Chip, State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University

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Wuhan Asdoptics Science and Technology Co., Ltd.

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