Preliminary Study of Superpolishing Sapphire Single Crystal Using Tin Lap

Chen Junpan; Cai Li; Gao Honggang; Chen Bin; Cao Jianlin

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Preliminary Study of Superpolishing Sapphire Single Crystal Using Tin Lap

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- Preliminary Study of Superpolishing Sapphire Single Crystal Using Tin Lap
- Optics and Precision Engineering Vol. 5, Issue 5, Pages: 69-72(1997)
- 作者机构：
  
  1. 长春光学精密机械学院长春,130022
  2. 中国科学院长春光学精密机械研究所应用光学国家重点实验室长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：28 June 1997，
  
  Published Online：15 October 1997，
  
  Published：15 October 1997
- 稿件说明：
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陈俊盼, 蔡立, 高宏刚, 陈斌, 曹健林. 用锡盘抛光 α-Al2O3 单晶的初步实验研究[J]. 光学精密工程, 1997,(5): 69-72

Chen Junpan, Cai Li, Gao Honggang, Chen Bin, Cao Jianlin. Preliminary Study of Superpolishing Sapphire Single Crystal Using Tin Lap[J]. Editorial Office of Optics and Precision Engineering, 1997,(5): 69-72
陈俊盼, 蔡立, 高宏刚, 陈斌, 曹健林. 用锡盘抛光 α-Al2O3 单晶的初步实验研究[J]. 光学精密工程, 1997,(5): 69-72 DOI：

Chen Junpan, Cai Li, Gao Honggang, Chen Bin, Cao Jianlin. Preliminary Study of Superpolishing Sapphire Single Crystal Using Tin Lap[J]. Editorial Office of Optics and Precision Engineering, 1997,(5): 69-72 DOI：

摘要

概述了抛光α-Al

单晶的意义、介绍了用锡盘抛光α-Al

单晶的实验装置、描述了抛光实验过程、研究了抛光时间和抛光液酸碱度对工件表面粗糙度的影响。通过改变抛光时间及抛光液pH值

可使α-Al

单晶工件表面粗糙度优于0.4nmrms.

Abstract

This paper is summary about the significance of polishing single crystal α-Al

introduces the machine and the experiment process of polishing single crystal α-Al

using tin lap

the influence of polishing time and pH value of polishing liquid to the surface roughness of workpieces

After polishing

the surface roughness is better than 0.4 nm rms.

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Related Institution

State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals， Lanzhou University of Technology

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Chongqing Institute of Green and Intelligent Technology， Chinese Academy of Sciences

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