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The Influence of Aberration on Measuring Sensitivity in Critical angle Method of Total Reflection for Focus Error Detection
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    • The Influence of Aberration on Measuring Sensitivity in Critical angle Method of Total Reflection for Focus Error Detection

    • Optics and Precision Engineering   Vol. 6, Issue 1, Pages: 122-126(1998)

    • Received：09 July 1997，

      Published Online：15 February 1998，

      Published：15 February 1998

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  • HOU Shu . The Influence of Aberration on Measuring Sensitivity in Critical angle Method of Total Reflection for Focus Error Detection[J]. Editorial Office of Optics and Precision Engineering, 1998,(1): 122-126 DOI：

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