Scanning X ray Interferometry for Nanometer Measurement

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- Scanning X ray Interferometry for Nanometer Measurement
- Optics and Precision Engineering Vol. 6, Issue 1, Pages: 47-52(1998)
- 作者机构：
  
  清华大学测试技术与仪器国家重点实验室, 北京 100084
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：09 June 1997，
  
  Revised：21 August 1997，
  
  Published Online：15 February 1998，
  
  Published：15 February 1998
- 稿件说明：
移动端阅览
王林, 曹芒, 李达成. 用于纳米测量的扫描X射线干涉技术[J]. 光学精密工程, 1998,(1): 47-52

WANG Lin, CAO Mang, LI Da-Cheng . Scanning X ray Interferometry for Nanometer Measurement[J]. Editorial Office of Optics and Precision Engineering, 1998,(1): 47-52
王林, 曹芒, 李达成. 用于纳米测量的扫描X射线干涉技术[J]. 光学精密工程, 1998,(1): 47-52 DOI：

WANG Lin, CAO Mang, LI Da-Cheng . Scanning X ray Interferometry for Nanometer Measurement[J]. Editorial Office of Optics and Precision Engineering, 1998,(1): 47-52 DOI：

介绍扫描Ｘ射线干涉仪在当前纳米测量技术中的重要意义

阐述了该技术的基本原理

全面介绍了国外在该领域的研究现状

并对影响纳米测量的扫描Ｘ射线干涉技术的主要因素进行了分析。

As an important technique in nanometer measurement

the fundamental principle and the latest development abroad of X ray interferometry are introduced.Furthermore

the main factors that influence the technology in realizing nanometer measurement are analyzed.

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