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Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis
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    • Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis

    • Optics and Precision Engineering   Vol. 6, Issue 1, Pages: 36-41(1998)

    • Received：21 July 1997，

      Published Online：15 February 1998，

      Published：15 February 1998

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  • WANG Xiao-Ye, XUE Shi-Fu, LI Qing-Xian, XU Yu-Xian, BAI Li-Fen, YU Shui . Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis[J]. Editorial Office of Optics and Precision Engineering, 1998,(1): 36-41 DOI：

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