周兆英, 叶雄英, 崔天宏, 张联. 微米纳米技术及微型机电系统[J]. 光学精密工程, 1998,(1): 1-7

ZHOU Zhaog-Ying, YE Xiong-Ying, CUI Tian-Hong, ZHANG Lian . Microtechnology/Nanotechnology and MEMS[J]. Editorial Office of Optics and Precision Engineering, 1998,(1): 1-7

周兆英, 叶雄英, 崔天宏, 张联. 微米纳米技术及微型机电系统[J]. 光学精密工程, 1998,(1): 1-7 DOI：

ZHOU Zhaog-Ying, YE Xiong-Ying, CUI Tian-Hong, ZHANG Lian . Microtechnology/Nanotechnology and MEMS[J]. Editorial Office of Optics and Precision Engineering, 1998,(1): 1-7 DOI：