The Method of Micro tiny Displacement Measurement by Dimension Reduction
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The Method of Micro tiny Displacement Measurement by Dimension Reduction
Optics and Precision EngineeringVol. 6, Issue 2, Pages: 115-119(1998)
作者机构:
中国科学院长春光学精密机械研究所 长春,130022
作者简介:
基金信息:
DOI:
CLC:
Received:26 September 1997,
Revised:14 January 1998,
Published Online:15 April 1998,
Published:15 April 1998
稿件说明:
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贺庚贤. 降维测量微小位移的方法[J]. 光学精密工程, 1998,(2): 115-119
HE Geng-Xian . The Method of Micro tiny Displacement Measurement by Dimension Reduction[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 115-119
HE Geng-Xian . The Method of Micro tiny Displacement Measurement by Dimension Reduction[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 115-119DOI:
The Method of Micro tiny Displacement Measurement by Dimension Reduction
This paper describes the principle of micro tiny displacement measurement by dimension reduction.Based the principle
micro tiny displacement test system has been established.The method of testing two dimentional displacement using a linear CCD is relized.Test system struction