Electron Tunnel Sensor Principles,Present Situation and Prospect

LONG Zhi-Feng; XUE Shi-Fu; LI Qing-Xiang

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Electron Tunnel Sensor Principles,Present Situation and Prospect

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- Electron Tunnel Sensor Principles,Present Situation and Prospect
- Optics and Precision Engineering Vol. 6, Issue 2, Pages: 1-6(1998)
- 作者机构：
  
  清华大学精密仪器与机械学系, 北京 100084
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：21 July 1997，
  
  Revised：21 October 1997，
  
  Published Online：15 April 1998，
  
  Published：15 April 1998
- 稿件说明：
移动端阅览
龙志峰, 薛实福, 李庆祥. 电子隧道传感器的原理、现状与发展[J]. 光学精密工程, 1998,(2): 1-6

LONG Zhi-Feng, XUE Shi-Fu, LI Qing-Xiang . Electron Tunnel Sensor Principles,Present Situation and Prospect[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 1-6
龙志峰, 薛实福, 李庆祥. 电子隧道传感器的原理、现状与发展[J]. 光学精密工程, 1998,(2): 1-6 DOI：

LONG Zhi-Feng, XUE Shi-Fu, LI Qing-Xiang . Electron Tunnel Sensor Principles,Present Situation and Prospect[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 1-6 DOI：

摘要

电子隧道传感器应用电子隧道原理对位移进行检测

结构简单

能耗低

它具有很高的灵敏度

并且不受尺寸限制

在微型化和集成化方面显示了良好的前景

各国科学家对电子隧道传感器进行了广泛的研究并制成了加速度计

红外探测器

磁强计

触觉传感器

这些传感器小巧且性能优异。本文介绍了电子隧道原理

对电子隧道传感器的结构和性能进行了描述

并讨论了电子隧道传感器的发展前景。

Abstract

A new class sensors based on electron tunneling effect are used to detect position.The device has a compact mechanical structure and novel sensitivity that will not decreases with the scales

and can be easily operated.Accelerometers

infrared detectors

magnetometers

and tactile sensors have been designed

built and tested.These sensors provide extremely high sensitivity

high bandwidth and wide dynamic range

and allowed miniaturization and integration.This paper has described the electron tunneling sensors performance and discussed their future development.

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Related Institution

Photoelectric Countermeasure Department， Changchun Institute of Optics， Fine Mechanics And Physics， Chinese Academy of Sciences

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

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China Academy of Space Technology

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