Fabrication of Binary Phase Gratings with Arbitrary-geometry Coding scheme

Sang Tao; Liao Jianghong; Lu Zhengwu; Zhao Jingli; Weng Zhicheng

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Fabrication of Binary Phase Gratings with Arbitrary-geometry Coding scheme

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- Fabrication of Binary Phase Gratings with Arbitrary-geometry Coding scheme
- Optics and Precision Engineering Vol. 5, Issue 1, Pages: 10-15(1997)
- 作者机构：
  
  1. 中国科学院长春光学精密机械研究所应用光学国家重点实验室, 长春, 130022
  2. 中国科学院上海技术物理研究所, 上海, 200083
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：03 April 1996，
  
  Published Online：15 February 1997，
  
  Published：15 February 1997
- 稿件说明：
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桑涛, 廖江红, 卢振武, 赵晶丽, 翁志成. 具有任意图形编码的二值位相光栅的制作[J]. 光学精密工程, 1997,(1): 10-15

Sang Tao, Liao Jianghong, Lu Zhengwu, Zhao Jingli, Weng Zhicheng. Fabrication of Binary Phase Gratings with Arbitrary-geometry Coding scheme[J]. Editorial Office of Optics and Precision Engineering, 1997,(1): 10-15
桑涛, 廖江红, 卢振武, 赵晶丽, 翁志成. 具有任意图形编码的二值位相光栅的制作[J]. 光学精密工程, 1997,(1): 10-15 DOI：

Sang Tao, Liao Jianghong, Lu Zhengwu, Zhao Jingli, Weng Zhicheng. Fabrication of Binary Phase Gratings with Arbitrary-geometry Coding scheme[J]. Editorial Office of Optics and Precision Engineering, 1997,(1): 10-15 DOI：

摘要

基于大规模集成电路加工技术介绍具有任意图形编码的二值位相光栅的制作过程。其中包括振幅掩模母版的制作和掩模图形的转移两部分。针对制作的25×25扇出的Dammann光栅

给出了实测结果

即:扇出点光强的均匀性偏差(以最大相对偏差来衡量)为9.7%

光栅的二维衍射效率为80.65%(除去光栅基板对光的两次反射作用)

最后分析了制作误差的影响

Abstract

In this paper

the fabrication of binary phase gratings with arbitrary geometry coding scheme has been represented based on the VLSI technology

which includes mask making and pattern transfering.For the fabricated 25?25 fan out Dammann grating

the tested results are given as :the fan-out uniformity deviation (the maximum relative deviation)is 9 7%

the 2D diffraction efficiency is 80 65%(without consideration of the reflection loss).At last the effects of fabrication errors are analyzed.

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Related Institution

The State Key Lab of Applied Optics, Changchun Institute of Optics aaad Fine Mechanics, Chinese Academy of Sciences

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