Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement

Fan Tianquan; Xie Changwen; Lu Deji; Geng Lihong; Gao Xuedong

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Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement

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- Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement
- Optics and Precision Engineering Vol. 5, Issue 2, Pages: 98-103(1997)
- 作者机构：
  
  中国科学院光电技术研究所成都,610029
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：18 December 1996，
  
  Published Online：15 April 1997，
  
  Published：15 April 1997
- 稿件说明：
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范天泉, 谢长文, 陆德基, 耿丽红, 曹学东. 排列互比法用于超精测角时产生系统误差的研究[J]. 光学精密工程, 1997,(2): 98-103

Fan Tianquan, Xie Changwen, Lu Deji, Geng Lihong, Gao Xuedong. Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 98-103
范天泉, 谢长文, 陆德基, 耿丽红, 曹学东. 排列互比法用于超精测角时产生系统误差的研究[J]. 光学精密工程, 1997,(2): 98-103 DOI：

Fan Tianquan, Xie Changwen, Lu Deji, Geng Lihong, Gao Xuedong. Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 98-103 DOI：

摘要

从理论上阐明了用排列互比法测量分度误差时

其测量结果中含有测量系统误差的原因

这主要是自准直仪十字丝倾斜与棱体(或仪器)倾斜和角晃动的综合影响所造成

并用实验加以验证。文章还介绍了消除和减少这种系统误差的方法。

Abstract

In this article

the reason of the systematical error in measurement result when indexing error is measured by permutation intercomparision method is described in theory.It is mainly due to the inclination of collimator's graticule & polygon or instrument and the different inclination of each reflection surface.It is proved by experiment.A method for reducing and eliminating this systematical error is described in the paper.

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Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology

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