Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope

Xue Shifu; Xu Yuxian; Li Qingxiang; Wang Xiaoye; Liu Yongsheng; Yu Shui

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Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope

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- Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope
- Optics and Precision Engineering Vol. 5, Issue 2, Pages: 43-49(1997)
- 作者机构：
  
  清华大学精密仪器与机械学系北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published Online：15 April 1997，
  
  Published：15 April 1997
- 稿件说明：
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薛实福, 徐毓娴, 李庆祥, 王晓晔, 刘永生, 于水. 原子力显微镜传感器的微机械加工技术的研究[J]. 光学精密工程, 1997,(2): 43-49

Xue Shifu, Xu Yuxian, Li Qingxiang, Wang Xiaoye, Liu Yongsheng, Yu Shui. Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 43-49
薛实福, 徐毓娴, 李庆祥, 王晓晔, 刘永生, 于水. 原子力显微镜传感器的微机械加工技术的研究[J]. 光学精密工程, 1997,(2): 43-49 DOI：

Xue Shifu, Xu Yuxian, Li Qingxiang, Wang Xiaoye, Liu Yongsheng, Yu Shui. Investigation of Microfabrication of the Force Sensor for the Atomic Force Microscope[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 43-49 DOI：

摘要

分析了现有的AFM力传感器的工艺特点及问题。在此基础上研究用KOH溶液两步法P+自停止腐蚀制作厚度精确可控的单晶硅悬臂梁;以SiO2为掩模

SF6刻蚀硅

用RIE与各向同性湿法化学腐蚀相结合使悬臂梁探针一次成形和用湿法腐蚀锐化探针

针尖半径约50nm.制定了适于批量生产的AFM力传感器加工工艺。

Abstract

In this paper

the leading feature of existent micromachining technology of AFM force sensors is discussed.On the basis of those

two step corrosion with KOH solution are researched

using heavily boron doped silicon as etch stop layer.Cantilever beams with precise thickness are formed from single crystal silicon.By means of SiO 2 mask and SF 6 etching corrosive

the cantilever beam with tip is shaped by reactive ion etching once through operation.The probe has been shaped by wet corrosive and the tip radius is about 50 nm.A batch fabrication process based on micromachining technology is presented for cantilevers with integrated conical tips which are suitable for the AFM.

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Related Author

XUE Shi-Fu

LI Qing-Xian

XU Yu-Xian

BAI Li-Fen

WANG Xiao-Ye

Kaijia NI

Haijun ZHANG

Yifan HU

Related Institution

Department of Precision Instruments and Mechanology, Tsinghua University

State Key Laboratory of Modern Optical Instrumentation， College of Optical Science and Engineering， Zhejiang University

Division of Mechanics and Manufacture Measurement Technology, Shanghai Institute of Measurement and Testing Technology

College of Instrument Science and Engineering, Harbin Institute of Technology

National Institute of Metrology

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