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中国科学院长春光学精密机械研究所 长春,130022
Received:27 March 1997,
Published Online:15 August 1997,
Published:15 August 1997
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王春霞. 复制光栅质量分析[J]. 光学精密工程, 1997,(4): 70-75
Wang Chunxia. Analysis on Quality of Reproduction Grating[J]. Editorial Office of Optics and Precision Engineering, 1997,(4): 70-75
王春霞. 复制光栅质量分析[J]. 光学精密工程, 1997,(4): 70-75 DOI:
Wang Chunxia. Analysis on Quality of Reproduction Grating[J]. Editorial Office of Optics and Precision Engineering, 1997,(4): 70-75 DOI:
分析了影响复制光栅衍射效率、分辨率及表面质量的因素
并介绍了提高复制光栅质量的方法。
Factors having effects on diffraction efficiency
resolution and surface quality of reproduction grating are analyzed in this paper.The methods are described to improve quality of the reproduction grating.
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