Synthesis and Decoupling for Parallel Mechanism of Multiple Links with Flexure Hinges

Wu Yihui

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Synthesis and Decoupling for Parallel Mechanism of Multiple Links with Flexure Hinges

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- Synthesis and Decoupling for Parallel Mechanism of Multiple Links with Flexure Hinges
- Optics and Precision Engineering Vol. 5, Issue 4, Pages: 36-40(1997)
- 作者机构：
  
  中国科学院长春光学精密机械研究所长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：16 January 1997，
  
  Published Online：15 August 1997，
  
  Published：15 August 1997
- 稿件说明：
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吴一辉. 多环柔性铰链平行机构的综合分析及解耦[J]. 光学精密工程, 1997,(4): 36-40

Wu Yihui. Synthesis and Decoupling for Parallel Mechanism of Multiple Links with Flexure Hinges[J]. Editorial Office of Optics and Precision Engineering, 1997,(4): 36-40
吴一辉. 多环柔性铰链平行机构的综合分析及解耦[J]. 光学精密工程, 1997,(4): 36-40 DOI：

Wu Yihui. Synthesis and Decoupling for Parallel Mechanism of Multiple Links with Flexure Hinges[J]. Editorial Office of Optics and Precision Engineering, 1997,(4): 36-40 DOI：

摘要

当微定位台的结构是多环、多自由度时

由于空间的限制

通常其运动方程是耦合的

需对它进行综合分析和解耦。本文用螺旋理论对多自由度柔性铰链的运动和动力学解耦问题进行研究和探讨

并以一实例说明了其解耦设计方法。这对准确实现指定动作、正确设定驱动点的位置、合理确定机构的结构形式

最大限度地减小各自由度间的动态干涉有很重要的意义。

Abstract

Due to space limit

the motion equations are often coupled when the micro positioning stage has multiple links and freedoms. Thus

synthesis and decouple are necessary. In this paper

the Screw Theory was applied to study the problem and an example was given to explain this decoupling design method. Then this will be a great help to obtain fine motion accuracy

correct driving point position and the reasonable structure to reduce dynamic interference between freedoms.

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