Studies of Preparation and Characteristics in Photothermo sensitive Microcrystal Glasses

Li Lei; XI Shu-Zhen

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Studies of Preparation and Characteristics in Photothermo sensitive Microcrystal Glasses

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- Studies of Preparation and Characteristics in Photothermo sensitive Microcrystal Glasses
- Optics and Precision Engineering Vol. 6, Issue 2, Pages: 29-35(1998)
- 作者机构：
  
  中国科学院长春光学精密机械研究所应用光学国家重点实验室长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：21 November 1997，
  
  Published Online：15 April 1998，
  
  Published：15 April 1998
- 稿件说明：
移动端阅览
李磊, 席淑珍. 光热敏微晶玻璃的制备及其特性研究[J]. 光学精密工程, 1998,(2): 29-35

LI Lei, XI Shu-Zhen . Studies of Preparation and Characteristics in Photothermo sensitive Microcrystal Glasses[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 29-35
李磊, 席淑珍. 光热敏微晶玻璃的制备及其特性研究[J]. 光学精密工程, 1998,(2): 29-35 DOI：

LI Lei, XI Shu-Zhen . Studies of Preparation and Characteristics in Photothermo sensitive Microcrystal Glasses[J]. Editorial Office of Optics and Precision Engineering, 1998,(2): 29-35 DOI：

摘要

研究了SiO

-R

O-Al

-ZnO-B

(R=Li、Na、K)系统的玻璃组成及光敏、热敏组分对敏化、成核及受控结晶的影响。在1320～1420℃熔化制备了原始透明玻璃。用=2537Å光源进行光刻

经400～560℃及2～5h热处理工艺

获得了性能良好的光热敏微晶玻璃。测定了玻璃中微晶相的密度变化

证明了体积效应。由x射线粉末衍射分析鉴定其微晶相为Li

O·SiO

晶粒尺寸为23.8nm.

Abstract

Glasses in the SiO

O Al

ZnO B

(R=Li、Na、K)system were prepared at 1320—1420℃.After UV photolithograph

the samples were treated at 400-560℃ for 2-5h.A UV lamp is used as light resource for photolithograph

the most intensive wavelength is at 2537.The effects of glass composition and photothermo sensitive components on the microcrystal property were studied.The volume effect was proved by measuring the density variation of the microcrystals.The microcrystal phase was characterized by x ray powder diffraction as Li

O·SiO

and grain size as 23.8nm.

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