A manipulator system for assemblying micro elements

ZHENG Wei; XU YU Xian; LI Qing-Xiang

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A manipulator system for assemblying micro elements

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- A manipulator system for assemblying micro elements
- Optics and Precision Engineering Vol. 6, Issue 4, Pages: 60-64(1998)
- 作者机构：
  
  清华大学精密仪器与机械学系, 北京 100084
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：16 March 1998，
  
  Published Online：15 August 1998，
  
  Published：15 August 1998
- 稿件说明：
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郑巍, 徐毓娴, 李庆祥. 微器件装配系统总体方案研究[J]. 光学精密工程, 1998,(4): 60-64

ZHENG Wei, XU YU Xian, LI Qing-Xiang . A manipulator system for assemblying micro elements[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 60-64
郑巍, 徐毓娴, 李庆祥. 微器件装配系统总体方案研究[J]. 光学精密工程, 1998,(4): 60-64 DOI：

ZHENG Wei, XU YU Xian, LI Qing-Xiang . A manipulator system for assemblying micro elements[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 60-64 DOI：

摘要

微器件装配技术是微机械的关键技术之一

本文从微器件装配系统的特性和功能出发

提出了一套微装配系统设计方案

并对系统各个组成部分进行分析

介绍了系统实现的方法。

Abstract

Microassembly is one of the key factors for micro electro mechanical systems.In this paper

a manipulator system for assemblying micro elements which is based on the properties and requirments of microassembly technology is presented.Design features of each components of this system are described and the methods to achieve these features are analysed.

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