On the Precision Measurement Method for the Angular Positions of the Probes in Three-Point Method

ZHANG Yu-Hua; WANG Xiao-Lin

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On the Precision Measurement Method for the Angular Positions of the Probes in Three-Point Method

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- On the Precision Measurement Method for the Angular Positions of the Probes in Three-Point Method
- Optics and Precision Engineering Vol. 7, Issue 1, Pages: 120-124(1999)
- 作者机构：
  
  1. 北京理工大学光电工程系北京,100081
  2. 山东工业大学机械工程学院济南,250061
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：07 May 1998，
  
  Published Online：15 February 1999，
  
  Published：15 February 1999
- 稿件说明：
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张宇华, 王晓林. 三点法中测头角位置的精密测量方法[J]. 光学精密工程, 1999,(1): 120-124

ZHANG Yu-Hua, WANG Xiao-Lin . On the Precision Measurement Method for the Angular Positions of the Probes in Three-Point Method[J]. Editorial Office of Optics and Precision Engineering, 1999,(1): 120-124
张宇华, 王晓林. 三点法中测头角位置的精密测量方法[J]. 光学精密工程, 1999,(1): 120-124 DOI：

ZHANG Yu-Hua, WANG Xiao-Lin . On the Precision Measurement Method for the Angular Positions of the Probes in Three-Point Method[J]. Editorial Office of Optics and Precision Engineering, 1999,(1): 120-124 DOI：

摘要

研究了三点法圆度及轴系误差测量中测头角位置的精密测量方法。设计了能直接测量非接触电容传感器测头实测状态下的角位置的测角系统

提出了克服测头角位置测量误差及三个测头灵敏度标定误差影响的校正方法。实验表明：采用本文提出的“多刻线”法测角精度优于1′

测头角位置测量误差及三个测头灵敏度标定误差对测量精度的影响可降致最小。

Abstract

A study on the precision measurement method for the angular positions of the probes in roundness and spindle error motion with three-point method has been carried out in this paper.A measuring system has been developed

which can simply measures the angular positions of the nontouching capacitance micrometer gauges under real measurement.A correction method is proposed

which can eliminate the effect of the angular position measurement errors and the calibration errors of the capacitance micrometer gauges on the roundness and spindle error motion measurements.Experiments show that the measurement error of the angular position of the probes measured by the multiple line method proposed in this paper is less than 1′

and the effect of the angular position measurement errors and the calibration errors of the capacitance micrometer gauges on the roundness and spindle error motion measurements can be lessened to minimum.

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