Measurement of Microstructures Topography

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Measurement of Microstructures Topography

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- Measurement of Microstructures Topography
- Optics and Precision Engineering Vol. 7, Issue 3, Pages: 7-13(1999)
- 作者机构：
  
  1. 中国科学院光电技术研究所微细加工光学技术国家重点实验室, 成都610209
  2. 四川联合大学物理系, 成都610041
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：03 November 1998，
  
  Published Online：15 June 1999，
  
  Published：15 June 1999
- 稿件说明：
移动端阅览
周明宝, 林大键, 郭履容, 郭永康. 微结构表面形貌的测量[J]. 光学精密工程, 1999,(3): 7-13

ZHOU Ming-Bao, LIN Da-Jian, GUO Lü-Rong, GUO Yong-Kang . Measurement of Microstructures Topography[J]. Editorial Office of Optics and Precision Engineering, 1999,(3): 7-13
周明宝, 林大键, 郭履容, 郭永康. 微结构表面形貌的测量[J]. 光学精密工程, 1999,(3): 7-13 DOI：

ZHOU Ming-Bao, LIN Da-Jian, GUO Lü-Rong, GUO Yong-Kang . Measurement of Microstructures Topography[J]. Editorial Office of Optics and Precision Engineering, 1999,(3): 7-13 DOI：

摘要

总结了现有各种微结构表面形貌测量方法

概述了这些方法的原理、特性及发展现状

并对各种方法的优越性、存在问题以及应用范围进行了比较。

Abstract

The existing various methods used to measure the surface topography of micro structures are described. The principle

property and present situation of these methods are analyzed. Comparison for superiority

the existing problems and the applied range of these methods are given.

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Related Institution

Institute of Manufacturing Engineering， Huaqiao University

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Key Laboratory of Road Construction Technology and Equipment， Ministry of Education （Chang' an University）

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