Application of UFD on Polishing Surfaces with Sub nanometer Scale Roughness

GAO Hong-Gang; WANG Jian-Ming

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Application of UFD on Polishing Surfaces with Sub nanometer Scale Roughness

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- Application of UFD on Polishing Surfaces with Sub nanometer Scale Roughness
- Optics and Precision Engineering Vol. 7, Issue 5, Pages: 80-84(1999)
- 作者机构：
  
  1. 中国科学院长春光学精密机械研究所应用光学国家重点实验室, 长春130022
  2. 中国科学院北京物理所, 北京100081
- 作者简介：
- 基金信息：
- DOI：
  CLC： TQ171.684
- Received：28 May 1999，
  
  Revised：21 July 1999，
  
  Published Online：15 October 1999，
  
  Published：15 October 1999
- 稿件说明：
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高宏刚, 王建明. 应用纳米级金刚石抛光亚纳米级光滑表面[J]. 光学精密工程, 1999,(5): 80-84

GAO Hong-Gang, WANG Jian-Ming . Application of UFD on Polishing Surfaces with Sub nanometer Scale Roughness[J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 80-84
高宏刚, 王建明. 应用纳米级金刚石抛光亚纳米级光滑表面[J]. 光学精密工程, 1999,(5): 80-84 DOI：

GAO Hong-Gang, WANG Jian-Ming . Application of UFD on Polishing Surfaces with Sub nanometer Scale Roughness[J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 80-84 DOI：

摘要

用爆炸法合成的纳米级金刚石是一种新型纳米材料

其物理机械特性与普通亚微米级金刚石微粉有很大差别。我们使用这种材料配制的抛光液对YVO4 晶体进行了超精密抛光的初步实验

获得了具有较低表面粗糙度(< 1 nm )的表面

发现了纳米金刚石作为抛光材料的独特之处。本文描述了实验结果

分析了抛光表面

并总结了纳米金刚石粉的抛光特性

提出了关于抛光中的材料去除过程的见解

Abstract

Ultrafine diamond powder synthesized by explosive detonation is a kind of new nano material with different properties from diamond powder we usually employ as abrasive. We used this kind of diamond as polishing abrasive in the superpolishing experiments on YVO 4. This paper describes the characteristics of this kind of diamond as polishing materials. Supersmooth surfaces were achieved with roughness less than 1 nm after the primary experiments. K

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