Study of Microfabrication and Error Calibration for Multilevel Diffractive Optical Element by Thin Film Deposition 

FU Yong-Qi; ZHAO Jing-Li; LI Ji-Xue; ZHANG Xin; ZHENG Xuan-Ming

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Study of Microfabrication and Error Calibration for Multilevel Diffractive Optical Element by Thin Film Deposition 

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- Study of Microfabrication and Error Calibration for Multilevel Diffractive Optical Element by Thin Film Deposition 
- Optics and Precision Engineering Vol. 7, Issue 5, Pages: 67-72(1999)
- 作者机构：
  
  中国科学院长春光学精密机械研究所应用光学国家重点实验室, 长春130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： O484.4+1
- Received：07 July 1999，
  
  Revised：26 July 1999，
  
  Published Online：15 October 1999，
  
  Published：15 October 1999
- 稿件说明：
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付永启, 赵晶丽, 李吉学, 张新, 郑宣明. 薄膜沉积多级衍射光学元件的微型制作与误差标定的研究[J]. 光学精密工程, 1999,(5): 67-72

FU Yong-Qi, ZHAO Jing-Li, LI Ji-Xue, ZHANG Xin, ZHENG Xuan-Ming . Study of Microfabrication and Error Calibration for Multilevel Diffractive Optical Element by Thin Film Deposition [J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 67-72
付永启, 赵晶丽, 李吉学, 张新, 郑宣明. 薄膜沉积多级衍射光学元件的微型制作与误差标定的研究[J]. 光学精密工程, 1999,(5): 67-72 DOI：

FU Yong-Qi, ZHAO Jing-Li, LI Ji-Xue, ZHANG Xin, ZHENG Xuan-Ming . Study of Microfabrication and Error Calibration for Multilevel Diffractive Optical Element by Thin Film Deposition [J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 67-72 DOI：

摘要

应用光刻和薄膜沉积技术

制作了多级衍射光学元件。对制作误差和影响误差的因素进行了分析。给出了改善对准误差的标校方法

并在实际的多级衍射光学元件制作过程中得到验证。

Abstract

Photolithographic patterning and thin film deposition were used for manufacturing multilevel diffractive optical element(DOE). Fabrication errors and its affecting factors were analyzed for multilevel DOE in this paper. Calibration method was come up with to modify alignment error. It was proved by actual manufacturing process that this method is available for aligning positioning error.

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