YU Ying-Jie, LI Peng-Sheng, QIANG Xi-Fu . Research on Focusing and Determining Center for Heterodyne Interference System[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 111-117
YU Ying-Jie, LI Peng-Sheng, QIANG Xi-Fu . Research on Focusing and Determining Center for Heterodyne Interference System[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 111-117DOI:
Research on Focusing and Determining Center for Heterodyne Interference System
To focus in optical system and to determine the center of rotary table are common problems in many measurement systems.The paper puts forward a method to focus and to determine the center of the rotary table combining a heterodyne interference measurement system.Then it analyses the accuracy of focusing and determining center and gives the results of an experiment.