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1. 重庆大学微系统研究中心 重庆,630044
2. 华南理工大学机电工程系, 广州 510641
Received:21 July 1997,
Revised:21 April 1998,
Published Online:15 August 1998,
Published:15 August 1998
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钟先信, 李建蜀, 肖沙里, 徐涛, 朱维安, 缪秀娥. 微系统集成技术研究的动向[J]. 光学精密工程, 1998,(4): 1-6
ZHONG Xian-Xin, LI Jian-Shu, XIAO Sha-Li, XU Tao, ZHU Wei-An, MIAO Xiu-E. Progress in Microsystems Integrated Technology[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 1-6
钟先信, 李建蜀, 肖沙里, 徐涛, 朱维安, 缪秀娥. 微系统集成技术研究的动向[J]. 光学精密工程, 1998,(4): 1-6 DOI:
ZHONG Xian-Xin, LI Jian-Shu, XIAO Sha-Li, XU Tao, ZHU Wei-An, MIAO Xiu-E. Progress in Microsystems Integrated Technology[J]. Editorial Office of Optics and Precision Engineering, 1998,(4): 1-6 DOI:
在微电子、微机械和微光学的基础上
集成传感器、执行器和信号处理单元于一体的微系统技术
是现代技术发展的一个新动向。微系统技术在微传感器、微执行器、微光学和专用集成微型仪器等方面有较大发展。微系统在一些工业中获得应用。
Based on microelectronics
micromechanics and microoptics
the microsystems technolgoy integrated sensors
actuators and processors
which are a technolgoy progcess.Recently
the micro sensors
microactuators microoptics and application specific integrated microinstrument(ASIM)gain some technology achievement.The microsystems are becoming acceped diveces for many industrial applications.
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