里见忠笃, 章亚男. 节流孔特性对抑制气浮工作台自激振动的效果研究[J]. 光学精密工程, 1998,(5): 33-38

SATOMI Tadaatsu, ZHANG Ya-Nan. The Effect of Orifice Characteristics on Reducing Self excited Vibration of Aerostatic x-y Stage[J]. Editorial Office of Optics and Precision Engineering, 1998,(5): 33-38

里见忠笃, 章亚男. 节流孔特性对抑制气浮工作台自激振动的效果研究[J]. 光学精密工程, 1998,(5): 33-38 DOI：

SATOMI Tadaatsu, ZHANG Ya-Nan. The Effect of Orifice Characteristics on Reducing Self excited Vibration of Aerostatic x-y Stage[J]. Editorial Office of Optics and Precision Engineering, 1998,(5): 33-38 DOI：