邵培革, 王立鼎, 任延同. 微机械元件和仪器新进展[J]. 光学精密工程, 1999,(1): 10-15

SHAO Pei-Ge, WANG Li-Ding, REN Yan-Tong . New Progress of MEMS Component and Instrument[J]. Editorial Office of Optics and Precision Engineering, 1999,(1): 10-15

邵培革, 王立鼎, 任延同. 微机械元件和仪器新进展[J]. 光学精密工程, 1999,(1): 10-15 DOI：

SHAO Pei-Ge, WANG Li-Ding, REN Yan-Tong . New Progress of MEMS Component and Instrument[J]. Editorial Office of Optics and Precision Engineering, 1999,(1): 10-15 DOI：