Structure Design and Simulation of Capacitive Micro accelerometer

ZHOU Hua; SHEN Lian-Guan; YOU Hui; LI Chuan-Qi

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Structure Design and Simulation of Capacitive Micro accelerometer

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- Structure Design and Simulation of Capacitive Micro accelerometer
- Optics and Precision Engineering Vol. 7, Issue 4, Pages: 59-64(1999)
- 作者机构：
  
  中国科技大学精密机械与精密仪器系合肥,230027
- 作者简介：
- 基金信息：
- DOI：
  CLC： O242.21
- Received：16 December 1998，
  
  Revised：20 April 1999，
  
  Published Online：15 August 1999，
  
  Published：15 August 1999
- 稿件说明：
移动端阅览
周华, 沈连官, 尤辉, 李川奇. 电容式微加速度计结构的建模及仿真[J]. 光学精密工程, 1999,(4): 59-64

ZHOU Hua, SHEN Lian-Guan, YOU Hui, LI Chuan-Qi . Structure Design and Simulation of Capacitive Micro accelerometer[J]. Editorial Office of Optics and Precision Engineering, 1999,(4): 59-64
周华, 沈连官, 尤辉, 李川奇. 电容式微加速度计结构的建模及仿真[J]. 光学精密工程, 1999,(4): 59-64 DOI：

ZHOU Hua, SHEN Lian-Guan, YOU Hui, LI Chuan-Qi . Structure Design and Simulation of Capacitive Micro accelerometer[J]. Editorial Office of Optics and Precision Engineering, 1999,(4): 59-64 DOI：

摘要

建立了电容式微加速度计的结构模型

运用有限元分析方法对其进行模态分析

研究了微加速度计结构尺寸对谐振频率和模态振型的影响

得出了结构尺寸对这两者的影响规律

为此类加速度计的结构设计提供了依据。

Abstract

A solid modeling of capacitive micro-accelerometer structure is described. The mode analysis by means of the Finite Element Method is presented. The influence of accelerometer structural dimension on the resonance frequency and structural mode is investigated

which offers reliable basis for the structure design of micro-accelerator.

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