Polishing Performance Comparison of Small Polishing Pad Worked in Different Motion Model in Computer Controlled Optical Polishing

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Polishing Performance Comparison of Small Polishing Pad Worked in Different Motion Model in Computer Controlled Optical Polishing

更新时间：2020-08-12

- Polishing Performance Comparison of Small Polishing Pad Worked in Different Motion Model in Computer Controlled Optical Polishing
- Optics and Precision Engineering Vol. 7, Issue 5, Pages: 73-79(1999)
- 作者机构：
  
  1. 中国科学院长春光学精密机械研究所应用光学国家重点实验室, 长春130022
  2. 成都精密光学工程研究中心, 成都610041
- 作者简介：
- 基金信息：
- DOI：
  CLC： TQ171.684
- Received：30 April 1999，
  
  Revised：21 May 1999，
  
  Published Online：15 October 1999，
  
  Published：15 October 1999
- 稿件说明：
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王权陡, 余景池, 张峰, 刘民才. 数控抛光中不同运动方式下小抛光盘抛光特性之比较[J]. 光学精密工程, 1999,(5): 73-79

WANG Quan-Dou, YU Jing-Chi, ZHANG Feng . Polishing Performance Comparison of Small Polishing Pad Worked in Different Motion Model in Computer Controlled Optical Polishing[J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 73-79
王权陡, 余景池, 张峰, 刘民才. 数控抛光中不同运动方式下小抛光盘抛光特性之比较[J]. 光学精密工程, 1999,(5): 73-79 DOI：

WANG Quan-Dou, YU Jing-Chi, ZHANG Feng . Polishing Performance Comparison of Small Polishing Pad Worked in Different Motion Model in Computer Controlled Optical Polishing[J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 73-79 DOI：

摘要

阐述行星运动与平转动两种运动方式下数控抛光中小抛光盘的工作函数

论述了抛光盘本身在不同运动方式下的材料磨损情况。通过采用计算机对抛光盘工作函数及磨损曲线的模拟将抛光盘的两种运动方式进行了分析与比较。

Abstract

Working functions of the small polishing pad that works in two motion models are discussed in the process of computer controlled optical polishing

one model is planet motion

the other is translation. Also

The wearing distribution of the polishing pad in two motions is introduced. At last

the performance curve and wearing distribution curve of the polishing pad are worked out by computer simulation. By means of analyse and comparison in two model simulation results

a better motion model is selected to be used in future process of computer controlled optical polishing.

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