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Application of the Excimer Laser Etching Technology in Micromachine
更新时间：2020-08-12

    • Application of the Excimer Laser Etching Technology in Micromachine

    • Optics and Precision Engineering   Vol. 7, Issue 5, Pages: 63-66(1999)
    • CLC： TN305.7

    • Received：15 July 1999，

      Revised：25 July 1999，

      Published Online：15 October 1999，

      Published：15 October 1999

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  • LIANG Jin-Qiu, YAO Jin-Song . Application of the Excimer Laser Etching Technology in Micromachine[J]. Editorial Office of Optics and Precision Engineering, 1999,(5): 63-66 DOI：

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