Overview of non-traditional micromachining technologies

LI Yong; GUO Min; ZHOU Zhao-ying

doi:null

您当前的位置：

首页 >

文章列表页 >

Overview of non-traditional micromachining technologies

更新时间：2020-08-12

- Overview of non-traditional micromachining technologies
- Optics and Precision Engineering Vol. 8, Issue 3, Pages: 287-291(2000)
- 作者机构：
  
  清华大学精密仪器与机械学系, 北京 100084
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG665;TN305.7
- Received：13 January 2000，
  
  Revised：29 February 2000，
  
  Published Online：15 June 2000，
  
  Published：15 June 2000
- 稿件说明：
移动端阅览
李勇, 郭旻, 周兆英. 特种微型机械加工技术[J]. 光学精密工程, 2000,(3): 287-291

LI Yong, GUO Min, ZHOU Zhao-ying. Overview of non-traditional micromachining technologies[J]. Editorial Office of Optics and Precision Engineering, 2000,(3): 287-291
李勇, 郭旻, 周兆英. 特种微型机械加工技术[J]. 光学精密工程, 2000,(3): 287-291 DOI：

LI Yong, GUO Min, ZHOU Zhao-ying. Overview of non-traditional micromachining technologies[J]. Editorial Office of Optics and Precision Engineering, 2000,(3): 287-291 DOI：

摘要

综述微型机电系统/微型机械的三维形状加工及极限尺寸加工的研究开发现状.相对硅微细加工和LIGA工艺

不采用掩膜版的特种微细加工技术

如微细激光成型、微细电火花加工以及微细机械加工等近年来取得较大进展

在三维微小机械结构成型上有独到优势;同时扫描隧道显微加工技术的开发将微型机械向极限尺寸领域推进.微型机电系统/微型机械的长足发展有赖于融合已有先进技术和交叉学科思想的微型机械加工技术的进一步研究开发.

Abstract

The research activities on non-traditional micromachining technologies to shape microstructures with 3 DOF and to make microstructures with ultimate size are summarized in this paper. Compared with silicon process and LIGA process

the non-traditional micromachining technologies without mask such as stereolithography

micro EDM and micro mechanical machining have got great progress in recent years

which have advantages especially in shaping microstructures with 3 DOF. At the same time

SPM processing technology accelerates miniaturization to ultimate size area. The research and development of micromachining technologies by integrating multidisciplinary novel ideas and advanced technologies will give the possibility for getting much further progress in MEMS/micromachines.

关键词

Keywords

references

Masuzawa T, et al. Wire electro-discharge grinding for micro-machining[J]. Annals of the CIRP, 1985, 34(1): 431－434.

李勇,等.微细电火花加工关键技术研究[J].清华大学学报(自然科学版),1999,39(8).45－48.

余祖元,等.放电加工による微细キヤビ于イの形成[J].东京大学生产技术研究所生产研究,1997,49(9),395－400.

Ikuta K, et al. Development of mass productive micro stereo lithography (Mass－IH process)[C]. Proceedings of IEEE Micro Electro Mechanical Systems, 1998, 301－306.

Ikuta K, et al. New micro stereo lithography for freely movable 3D micro structure[C]. Proceedings of IEEE Micro Electro Mechanical Systems, 1998, 290－295.

Higuchi T, et al. A new fabrication method for micro actuators with piezoelectric thin film using precision cutting technique[C]. Proceedings of IEEE Micro Electro Mechanical Systems, 1996, 307－311.

Friedrich C R, Vasile M J. Development of the micromilling process for high-aspect-ratio microstructures[J]. Journal of Microelectromechanical Systems. 1996, 5(1): 33－38.

Suda M, et al. Electrochemical and optical processing of micro structures by scanning probe microscopy (SPM) [C]. Proceedings of IEEE Micro Electro Mechanical Systems, 1996, 296－300.

Views

351

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

The Successive Mapping Detection Method of Micro EDM Discharge State Detection

Micro electrodes on-line measurement in micro EDM

Fully compliant mechanisms and MEMS

Development of a Practicl Excimer Laser Micromachining Tool

The Application of Excimer Laser Deep Lithography in LIGA Process

Related Author

郑新毅

任小涛

贾振元

张玲瑄

ZHANG Yong

LI Zhi-yong

LI Gang

ZHAO Wan-sheng

Related Institution

大连理工大学2. 大连理工大学机械工程学院

School of Mechanical and Electrical Engineering, Harbin Institute of Technology

School of Mechanical and Power Engineering, Shanghai Jiao Tong University

Robotics Research Institute, Beijing University of Aeronautics and Astronautics

National Center of Laser Technology, Beijing Polytechnic University

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰