Phase-unwrapping for interferograms with circle field

LI Guo-dong; WEI Chun-long; YU Ying-jie; CHENG Wei-ming; CHEN Ming-yi

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Phase-unwrapping for interferograms with circle field

更新时间：2020-08-12

- Phase-unwrapping for interferograms with circle field
- Optics and Precision Engineering Vol. 8, Issue 5, Pages: 473-477(2000)
- 作者机构：
  
  1. 上海大学嘉定校区精密机械工程系, 上海201800
  2. 上海大学嘉定校区通信工程系, 上海201800
- 作者简介：
- 基金信息：
- DOI：
  CLC： O438
- Received：10 March 2000，
  
  Revised：30 June 2000，
  
  Published Online：15 October 2000，
  
  Published：15 October 2000
- 稿件说明：
移动端阅览
李国栋, 韦春龙, 于瀛洁, 程维明, 陈明仪. 圆形域干涉图中的相位解包裹[J]. 光学精密工程, 2000,(5): 473-477

LI Guo-dong, WEI Chun-long, YU Ying-jie, CHENG Wei-ming, CHEN Ming-yi . Phase-unwrapping for interferograms with circle field[J]. Editorial Office of Optics and Precision Engineering, 2000,(5): 473-477
李国栋, 韦春龙, 于瀛洁, 程维明, 陈明仪. 圆形域干涉图中的相位解包裹[J]. 光学精密工程, 2000,(5): 473-477 DOI：

LI Guo-dong, WEI Chun-long, YU Ying-jie, CHENG Wei-ming, CHEN Ming-yi . Phase-unwrapping for interferograms with circle field[J]. Editorial Office of Optics and Precision Engineering, 2000,(5): 473-477 DOI：

摘要

相位解包裹问题是许多干涉术中存在的基本问题.运用DCT方法的解包裹算法是十分有效、健壮的

然而仅适用于方形域条纹图处理.本文引入加权迭代方法将其有效地运用于常见的圆形域干涉图的处理.模拟结果表明

加权迭代法的计算精度可达10

-7

rad

相对于普通的DCT解包裹算法有非常大的提高.我们在自行研制的DOP-2000型数字光学轮廓仪上

运用相移干涉术对一多刻线样板进行了测量

实验结果进一步表明

本文的加权迭代法是一种非常有效和实用的方法.

Abstract

Phase-unwrapping is a basic problem in many interferometry. The phase unwrapping algorithm using DCT method is one of specially effective and robust ones. However

it is only suitable for rectangle fields. In this paper

it is effectively used for circle fields by introducing weighted and iterative methods. The computer simulation shows that the accuracy can reach to 10

-7

rad and important improvement is made. A sample of multiline is measured using phase-stepping interferometry in DOP-2000 digital optical profiler developed by us. Further experimental results indicate that the method is very effective and practical.

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Related Institution

南京理工大学电子工程与光电技术学院

中国科学院长春光学精密机械与物理研究所光学技术研究中心

College of Fine Photoelectric Instrument and Engineering, Harbin Institute of Technology

Department of Image Science, Facully of Engineering, Chiba University, 133 Yayoi-cho, Inage-, Chiba

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

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