Dynamic characteristic analysis of the micropositioning system driven by PZT actuator

JIA Hong-guang; WU Yi-hui; YU Zhen-lei; WANG Li-Ding

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Dynamic characteristic analysis of the micropositioning system driven by PZT actuator

更新时间：2020-08-12

- Dynamic characteristic analysis of the micropositioning system driven by PZT actuator
- Optics and Precision Engineering Vol. 8, Issue 5, Pages: 440-443(2000)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM384
- Received：05 June 2000，
  
  Revised：06 July 2000，
  
  Published Online：15 October 2000，
  
  Published：15 October 2000
- 稿件说明：
移动端阅览
贾宏光, 吴一辉, 于振雷, 王立鼎. 压电驱动微位移工作台动态特性分析[J]. 光学精密工程, 2000,(5): 440-443

JIA Hong-guang, WU Yi-hui, YU Zhen-lei, WANG Li-ding. Dynamic characteristic analysis of the micropositioning system driven by PZT actuator[J]. Editorial Office of Optics and Precision Engineering, 2000,(5): 440-443
贾宏光, 吴一辉, 于振雷, 王立鼎. 压电驱动微位移工作台动态特性分析[J]. 光学精密工程, 2000,(5): 440-443 DOI：

JIA Hong-guang, WU Yi-hui, YU Zhen-lei, WANG Li-ding. Dynamic characteristic analysis of the micropositioning system driven by PZT actuator[J]. Editorial Office of Optics and Precision Engineering, 2000,(5): 440-443 DOI：

摘要

压电驱动微位移工作台的动态特性分析对其设计及实际应用都有很大的指导作用.本文在线性化的前提下

通过对这种微位移工作台各个组成部分的相应简化

分析了在频响低于共振频率时微位移工作台的动态特性

得出了其传递函数.另外

本文还对影响工作台设计的两个重要边界条件-初始预紧力和工作台所能达到的最大频响进行了比较详细的推导

给出了其所应满足的量化指标.

Abstract

The dynamic characteristic analysis of the micropositioning system driven by the PZT actuator is very important to design and application. By simplifying parts of the micropositioning system based on linearization

this paper analyzes the dynamic characteristics of the system working below resonance frequency

and its transfer function. Meanwhile

two boundary conditions-the maximum frequency response and preload that should be fed are analyzed.

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