Computer-aided test of parameters characteristic of optical thin films

Hu Jun; Qi Yu

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Computer-aided test of parameters characteristic of optical thin films

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- Computer-aided test of parameters characteristic of optical thin films
- Optics and Precision Engineering Vol. 8, Issue 6, Pages: 540-543(2000)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP391.76
- Received：05 October 2000，
  
  Revised：01 November 2000，
  
  Published Online：15 December 2000，
  
  Published：15 December 2000
- 稿件说明：
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胡君, 齐钰. 计算机辅助检测光学薄膜参数特性的一种方法探讨[J]. 光学精密工程, 2000,(6): 540-543

HU Jun, QI Yu . Computer-aided test of parameters characteristic of optical thin films[J]. Editorial Office of Optics and Precision Engineering, 2000,(6): 540-543
胡君, 齐钰. 计算机辅助检测光学薄膜参数特性的一种方法探讨[J]. 光学精密工程, 2000,(6): 540-543 DOI：

HU Jun, QI Yu . Computer-aided test of parameters characteristic of optical thin films[J]. Editorial Office of Optics and Precision Engineering, 2000,(6): 540-543 DOI：

摘要

简要的叙述了光学薄膜光学特性的通用计算方法

即特征矩阵法.采用这种方法的逆运算形式

应用计算机辅助计算和检测技术

在国内首次完成对多层光学薄膜镀膜后或制备过程中各膜层光学厚度的检测.同时介绍了有关的计算公式和计算程序流程

最后给出试验数据结果和结论.

Abstract

A general calculating method of optical character of optical thin films

namely characteristic matrix method is stated concisely. By taking the method of inverse operation and the computer-aided technique

the testing of thickness of optical thin films is completed firstly in China. Meanwhile

this method is also applied to the process of this coated film. The related computing formula and the programming flow chart are introduced and the experimental data is also depicted. The conclusion from our demonstration metioned above is given at last.

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Application of CAD in Design and Manufacture for Optical thin Films

Related Author

Yang Shumei

Related Institution

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022

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