The study of LIGA technology

LIANG Jing-qiu; YAO Jin-Song

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The study of LIGA technology

更新时间：2020-08-12

- The study of LIGA technology
- Optics and Precision Engineering Vol. 8, Issue 1, Pages: 38-41(2000)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN305.7
- Received：25 August 1999，
  
  Revised：05 September 1999，
  
  Published Online：15 February 2000，
  
  Published：15 February 2000
- 稿件说明：
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梁静秋, 姚劲松. LIGA技术基础研究[J]. 光学精密工程, 2000,(1): 38-41

LIANG Jing-qiu, YAO Jin-song . The study of LIGA technology[J]. Editorial Office of Optics and Precision Engineering, 2000,(1): 38-41
梁静秋, 姚劲松. LIGA技术基础研究[J]. 光学精密工程, 2000,(1): 38-41 DOI：

LIANG Jing-qiu, YAO Jin-song . The study of LIGA technology[J]. Editorial Office of Optics and Precision Engineering, 2000,(1): 38-41 DOI：

摘要

阐述了LIGA技术的组成及特点.对LIGA工艺掩膜、X射线光刻、电铸及塑铸等进行了工艺原理分析.用一次成型法制作了以聚酰亚胺为衬基、以Au为吸收体的X射线光刻掩膜.简单介绍了这种掩膜的制作工艺过程

并用这种掩膜在北京电子对撞机国家实验室进行了同步辐射X射线光刻

得到了深度为500μm

深宽比达8.3的PMMA材料的微型电磁马达联轴器结构.给出掩膜和X射线光刻照片.同时

对Au、Ni等金属材料的厚膜电铸进行了工艺研究.

Abstract

The composition and feature of LIGA technology was explicated. The principles of LIGA process on mask

X-ray lithography

electroform and model were analyzed. The X-ray lithography mask using polyamide as substrate and using Au as a absorber was fabricated by one step forming. The synchronous radiation X-ray lithography experiment using this kind of mask was made in Beijing Key Lab of the Synchronous Radiation. The PMMA linkage structure of micro electromagnetic motor with depth of 500μm and depth width radio of 8.3 was made. The SEM photo of X-ray lithography and mask was given. The electroform technique of Au and Ni metal thick film were studied

too.

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ZHU Di

HU Yang-yang

WANG Rui-ting

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Related Institution

University of Chinese Academy of Sciences

南京航空航天大学江苏省精密与微细制造技术重点实验室

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Graduate School of the Chinese Academy of Sciences, Beijing 100039, China

College of Mathematics, Jilin University

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