Development of microgripper technology

ZHANG Pei-yu; WU GUO-ying; HAO Yi-long; LI Zhi-jun

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Development of microgripper technology

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- Development of microgripper technology
- Optics and Precision Engineering Vol. 8, Issue 3, Pages: 292-296(2000)
- 作者机构：
  
  北京大学微电子所, 北京 100871
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN305.7
- Received：05 December 1999，
  
  Revised：21 February 2000，
  
  Published Online：15 June 2000，
  
  Published：15 June 2000
- 稿件说明：
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张培玉, 武国英, 郝一龙, 李志军. 微夹钳研究的进展与展望[J]. 光学精密工程, 2000,(3): 292-296

ZHANG Pei-yu, WU GUO-ying, HAO Yi-long, LI Zhi-jun. Development of microgripper technology[J]. Editorial Office of Optics and Precision Engineering, 2000,(3): 292-296
张培玉, 武国英, 郝一龙, 李志军. 微夹钳研究的进展与展望[J]. 光学精密工程, 2000,(3): 292-296 DOI：

ZHANG Pei-yu, WU GUO-ying, HAO Yi-long, LI Zhi-jun. Development of microgripper technology[J]. Editorial Office of Optics and Precision Engineering, 2000,(3): 292-296 DOI：

摘要

微夹钳技术是微机械技术的重要内容之一.本文首先论述了微夹钳的应用背景

回顾了微夹钳技术研究的历史及现状;对目前国内外所研究的微夹钳进行了分类

并对其结构工艺与工作原理进行了分析;最后

对微夹钳技术的发展进行了展望.

Abstract

Microgripper technique was one of important parts in micromachine techniques. Firstly

the application background was recounted in the paper. The development and actualities of research in microgripper technique were reviewed. Secondly

microgrippers were classified. The structural arts and work principle were analyzed. Finally

the development of microgripper techniques was prospected.

关键词

Keywords

references

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