MgF2-overcoated aluminium films for ultraviolet and vacuum ultraviolet

LIU Ying; LI Fu-tian

doi:null

您当前的位置：

首页 >

文章列表页 >

MgF₂-overcoated aluminium films for ultraviolet and vacuum ultraviolet

更新时间：2020-08-12

- MgF₂-overcoated aluminium films for ultraviolet and vacuum ultraviolet
- Optics and Precision Engineering Vol. 9, Issue 2, Pages: 165-168(2001)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： O484.4+1
- Received：28 November 2000，
  
  Revised：08 December 2000，
  
  Published Online：15 April 2001，
  
  Published：15 April 2001
- 稿件说明：
移动端阅览
刘颖, 李福田. 紫外-真空紫外波段的Al+MgF2膜[J]. 光学精密工程, 2001,(2): 165-168

LIU Ying, LI Fu-tian . MgF2-overcoated aluminium films for ultraviolet and vacuum ultraviolet[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 165-168
刘颖, 李福田. 紫外-真空紫外波段的Al+MgF2膜[J]. 光学精密工程, 2001,(2): 165-168 DOI：

LIU Ying, LI Fu-tian . MgF2-overcoated aluminium films for ultraviolet and vacuum ultraviolet[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 165-168 DOI：

摘要

Al+MgF

膜是真空紫外波段常用的一种反射膜。根据薄膜光学的电磁场理论计算了正入射条件下Al+MgF

膜在真空紫外波段的反射率随氟化镁膜厚度的变化规律。研究了Al+MgF

膜的制备工艺

利用Seya-Namioka紫外-真空紫外反射率计测得Al+MgF

膜的反射率在150nm～340nm的波段上高于80%。Al+MgF

膜制备一年后

其真空紫外波段的反射率未有明显变化。

Abstract

MgF

-overcoated aluminium films are often used in the spectral range of vacuum ultraviolet. According to the theory of electromagnetism

reflectance of Al+MgF

at normal incident was calculated in the way of matrix optics where the optical constant of MgF

was taken as a complex number. The effect of thickness of MgF

on the reflectance of Al+MgF

coatings was considered. The MgF

not only prevents the aluminum from being oxidized

but also increases the reflectance of Al+MgF

by interference. The reflectance of Al+MgF

at incident angle of 10°from 150nm～340nm is above 80% which was measured by Seya-Namioka UV-VUV reflectometer. The reflectance of Al+MgF

does not change distinctly after the aging of one year or keeping at the temperature of 55℃ for 12 h. The paper also discusses the preparation of Al+MgF

films.

关键词

Keywords

references

Hass G, Hunter W R, Tousey R. Reflectance of evaporated aluminium in the vacuum ultraviolate[J]. J.Opt. Soc. Am., 1956, 46(12): 1009-1012.

Samson James A R. Techniques of vacuum ultraviolet spectroscopy[M]. New York:John Wiley & Sons, Inc., 1967.

严瑛白. 应用物理光学[M].北京:机械工业出版社, 1990.

Steans D G. The scattering of X-rays from nonideal multilayer structures[J]. J. Appl. Phys,1989,65(2): 491-506.

Views

611

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Development of high performance and large size X-ray multilayer reflective optics

Calibration of VUV spectroradiometers for space exploration

Focusing performance evaluation of ellipsoidal neutron-focusing mirror for small-angle neutron scattering

Ultraviolet absorption film technology based on ion beam sputtering Ta2O5 thin films

Ultraviolet absorption film technology based on ion beam sputtering Ta₂O₅ thin films

Related Author

WANG Zhanshan

HUANG Qiushi

QI Runze

ZHANG Zhe

LI Wenbin

JIANG Li

ZHANG Yunxue

ZHUANG Yeqi

Related Institution

Institute of Precision Optical Engineering， MOE Key Laboratory of Advanced Micro-Structured Materials， School of Physics Science and Engineering， Tongji University

Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences

Beijing Zhenxing Institute of Metrology and Measurement

School of Aerospace， Tsinghua University

Ningbo Institute of Dalian University of Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰