Measurement of surface roughness by scattering method

NI Qi-liang; CHEN Bo

doi:null

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Measurement of surface roughness by scattering method

更新时间：2020-08-12

- Measurement of surface roughness by scattering method
- Optics and Precision Engineering Vol. 9, Issue 2, Pages: 155-158(2001)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG84
- Received：17 November 2000，
  
  Revised：16 December 2000，
  
  Published Online：15 April 2001，
  
  Published：15 April 2001
- 稿件说明：
移动端阅览
尼启良, 陈波. 散射法表面粗糙度测量[J]. 光学精密工程, 2001,(2): 155-158

NI Qi-liang, CHEN Bo . Measurement of surface roughness by scattering method[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 155-158
尼启良, 陈波. 散射法表面粗糙度测量[J]. 光学精密工程, 2001,(2): 155-158 DOI：

NI Qi-liang, CHEN Bo . Measurement of surface roughness by scattering method[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 155-158 DOI：

摘要

介绍了标量和矢量两种散射理论

并用软X射线反射率计对超光滑表面进行散射测量

同时应用这两种理论计算了超光滑表面粗糙度均方根值

从计算结果来看

两种理论所得结果与WYKO测量结果吻合较好。

Abstract

The paper describes scalar and vector-scattering theories.Using a soft X-ray reflectometer

the super smooth surface has been measured by scattering method

and the roughness of super smooth surface has been calculated by means of scalar and vector scattering theories. The calculating results are in accordance with those measured by WYKO.

关键词

Keywords

references

Beckmann P, Spizzichino A. The scattering of electromagnetic waves from rough surface[M]. London: Pergamon Press, 1963.

Hogrefe Henning,Kunz Christof. Soft X-ray scattering from rough surface: experimental and theoretical analysis[J]. Appl. Opt,1987,26(4):2851-2859.

de Korte P A J,Laine R. Assessment of surface roughness by X-ray scattering and differential interference contrast microscopy[J]. Appl. Opt,1979,18(2):236－242.

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