Fiber point diffraction interferometer

LIU Guo-gang; ZHANG Xue-jun; WANG Quan-dou; ZHANG Zhong-yu; GUO Pei-ji; ZHANG Feng; QI Di-

doi:null

您当前的位置：

首页 >

文章列表页 >

Fiber point diffraction interferometer

更新时间：2020-08-12

- Fiber point diffraction interferometer
- Optics and Precision Engineering Vol. 9, Issue 2, Pages: 142-145(2001)
- 作者机构：
  
  中科院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：01 December 2000，
  
  Revised：06 December 2000，
  
  Published Online：15 April 2001，
  
  Published：15 April 2001
- 稿件说明：
移动端阅览
刘国淦, 张学军, 王权陡, 张忠玉, 郭培基, 张峰, 齐涤菲. 光纤点衍射干涉仪的技术研究[J]. 光学精密工程, 2001,(2): 142-145

LIU Guo-gang, ZHANG Xue-jun, WANG Quan-dou, ZHANG Zhong-yu, GUO Pei-ji, ZHANG Feng, QI Di-fei . Fiber point diffraction interferometer[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 142-145
刘国淦, 张学军, 王权陡, 张忠玉, 郭培基, 张峰, 齐涤菲. 光纤点衍射干涉仪的技术研究[J]. 光学精密工程, 2001,(2): 142-145 DOI：

LIU Guo-gang, ZHANG Xue-jun, WANG Quan-dou, ZHANG Zhong-yu, GUO Pei-ji, ZHANG Feng, QI Di-fei . Fiber point diffraction interferometer[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 142-145 DOI：

摘要

提出一种用光纤实现点衍射干涉的方法

由两根光纤分别传输参考光和测试光

利用单模光纤的小纤芯所产生的高质量衍射球面波进行超精面形的测量。与传统的干涉仪相比

该方法结构相对简单

误差来源少

且不需要传统干涉仪中的高质量标准面

而是由光纤提供高精度的参考波面。

Abstract

A method implementing point-diffraction interferometry based on fiber is proposed. Two fibers transmit reference wave and testing wave

respectively

the high quality diffractive spherical wavefront created by single mode fiber can be used for measuring super-precision surface. Compared with conventional interferometers

the configuration is easier and less error.Instead of the traditional standard surface

the fiber will provide high quality reference wavefront.

关键词

Keywords

references

Malacara Daniel. Optical shop testing[M].北京:机械工业出版社, 1978.

刘德民,向清,黄德修. 光纤光学[M].北京:国防工业出版社,1995.

Sommargren Gary E. Phase shifting diffraction interferometry for measure extreme ultraviolet optics[A].OSA Annual Meeting[C]1997.

张忠玉,余景池. 用补偿器测量非球面的研究[J].光学精密工程,1999,7(1):125-129.

Views

702

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Reflective shearing point diffraction interferometer for phase defect measurement

Test and evaluation of wavefront phase of point diffraction

Related Author

Yun MA

Yi-ming LIU

Wen-hua ZHU

MA Dong-mei

CHEN Tu-quan

Related Institution

Advanced Launch Corporative Innovation Center, Nanjing University of Science and Technology

School of Electronic and Optical Engineering, Nanjing University of Science and Technology

Changchun Institute of Optics, Fine Mechanics and Physic, Chinese Academy of Sciences

Graduate University of Chinese Academy of Sciences, Beijing 100039, China

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰