Inertia-friction based 4 D.O.F. microactuator driven by PZT

CHI Dong-xiang; YAN Guo-zheng; DING Guo-qing

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Inertia-friction based 4 D.O.F. microactuator driven by PZT

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- Inertia-friction based 4 D.O.F. microactuator driven by PZT
- Optics and Precision Engineering Vol. 9, Issue 2, Pages: 135-138(2001)
- 作者机构：
  
  上海交通大学电子信息学院精密工程及智能微系统研究所上海,200030
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP242
- Received：13 November 2000，
  
  Revised：15 January 2001，
  
  Published Online：15 April 2001，
  
  Published：15 April 2001
- 稿件说明：
移动端阅览
迟冬祥, 颜国正, 丁国清. 基于惯性-摩擦原理的PZT驱动四自由度微驱动器的研究[J]. 光学精密工程, 2001,(2): 135-138

CHI Dong-xiang, YAN Guo-zheng, DING Guo-qing . Inertia-friction based 4 D.O.F. microactuator driven by PZT[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 135-138
迟冬祥, 颜国正, 丁国清. 基于惯性-摩擦原理的PZT驱动四自由度微驱动器的研究[J]. 光学精密工程, 2001,(2): 135-138 DOI：

CHI Dong-xiang, YAN Guo-zheng, DING Guo-qing . Inertia-friction based 4 D.O.F. microactuator driven by PZT[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 135-138 DOI：

摘要

提出了一种由PZT驱动、基于惯性-摩擦原理的四自由度驱动器方案

在原理实验的基础上制作了四自由度驱动器的原型

并讨论了这一微驱动器的运动特点。实验证明:这一原理应用于微驱动器是可行的。压电陶瓷的通电频率处于0Hz～30000Hz时微驱动器的运动是线性可控的。同时

也讨论了驱动器设计中应该注意的问题及其未来的研究方向。

Abstract

An inertia friction based 4 D.O.F microactuator driven by PZT is presented. The 4 D.O.F microactuator prototype made based on an experiment and its kinematic characteristics are discussed. The experiment proves that it is feasible to apply the driving principle to the microactuator. The microactuator is linear and controllable at the frequency between 0 to 3000 Hz of voltage. The existing design problems and the future research on the microactuator are discussed as well.

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references

Asano M, Matsuoka T, Okamoto H, et al. Study on micro mobile machine with piezoelectric driving force actuator[A]. IEEE Inter. Conf. on Robotics and Automation[C]. 1995.2955-2960.

Matsuoka Toshiyuki, Asano Motomu, Mitsuishi Setsuya, et al. Improvement of micro mobile machine with piezoelectric driving force actuator[A]. Sixth International Symposium on Micro Machine and Human Science[C]. 1995,211-217.

Chen Huibao, Sun Ping. The design of two-layer flexible hinge mill-gripper[A].Seventh International Symposium on Micro Machine and Human Science[C].1996,99-105

褚祥诚,陈维山,陈在礼. 超声波马达在美国的发展[J].压电与声光,1999,21(1):37-40.

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