Linear motor's control in laser resistance trimmer

LIU Wei

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Linear motor's control in laser resistance trimmer

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- Linear motor's control in laser resistance trimmer
- Optics and Precision Engineering Vol. 9, Issue 4, Pages: 311-314(2001)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 吉林长春, 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM359.4;TN409
- Received：15 May 2001，
  
  Revised：21 May 2001，
  
  Published Online：15 August 2001，
  
  Published：15 August 2001
- 稿件说明：
移动端阅览
刘伟. 直线电机在微电子领域中的应用[J]. 光学精密工程, 2001,(4): 311-314

LIU Wei. Linear motor's control in laser resistance trimmer[J]. Editorial Office of Optics and Precision Engineering, 2001,(4): 311-314
刘伟. 直线电机在微电子领域中的应用[J]. 光学精密工程, 2001,(4): 311-314 DOI：

LIU Wei. Linear motor's control in laser resistance trimmer[J]. Editorial Office of Optics and Precision Engineering, 2001,(4): 311-314 DOI：

摘要

直线电机是一种做直线运行的驱动电机.它的性能优劣直接影响到设备的精度、生产效率及产品的质量.文章介绍了如何用工业控制器和直线电机驱动器实现直线电机的超高速、高精度、无过冲、无振荡控制.直线电机的速度环由驱动器用PP算法闭合

位置环由工业控制器用带速度前馈的PID算法闭合.

Abstract

Linear motor is a key part of the laser resistance trimmer. Its performance directly affects the quality and efficiency of trimming resistance. How to control the linear motor's speed

precision

non-shock

non-surge by PMAC controller and speed-mode amplifier is introduced. Drier closes the speed-loop with PP arithmetic

and the speed-feedforward PID arithmetic closes the position-loop.

关键词

Keywords

references

王伟.PID参数先进整定方法综述[J].自动化学报.2000,26(3):347-356.

李庆雷.永磁同步直线电机推力波分析及改善措施[J].清华大学学报.2000,40(5):33-36.

叶斌.电力电子应用技术及装置[M].北京:中国铁道出版社,1999.

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Related Author

Zhao Shuangquan

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Related Institution

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

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