Binary Laser Direct Writing System and Its Applications
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Binary Laser Direct Writing System and Its Applications
Optics and Precision EngineeringVol. 9, Issue 5, Pages: 451-454(2001)
作者机构:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun,China,130022
作者简介:
基金信息:
DOI:
CLC:TN249
Received:29 August 2001,
Revised:16 September 2001,
Published Online:15 October 2001,
Published:15 October 2001
稿件说明:
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LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. 光学精密工程, 2001,(5): 451-454
LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 451-454
LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. 光学精密工程, 2001,(5): 451-454DOI:
LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 451-454DOI:
Binary Laser Direct Writing System and Its Applications
A new laser direct writing system is introduced and the potential application of the diffractive optical elements (DOE's) fabricated by applying laser direct writing system are presented. The fabrication techniques by applying the laser direct writing are developed. Experimental results have been obtained by applying laser direct writing machine with line width of 5μm and 10μm.
Abstract
A new laser direct writing system is introduced and the potential application of the diffractive optical elements (DOE's) fabricated by applying laser direct writing system are presented. The fabrication techniques by applying the laser direct writing are developed. Experimental results have been obtained by applying laser direct writing machine with line width of 5μm and 10μm.